晶圓製造及半導體製造業放流水標準

These Standards are determined pursuant to Article 7, Paragraph 2 of the Water Pollution Control Act.

"Total Toxic Organics" means the sum of concentration levels of the following 30 types of chemical compounds: 1,2-Dichlorobenzene, 1,3-Dichlorobenzene, 1,4-Dichlorobenzene, 1,2,4- Trichlorobenzene, Toluene, Ethylbenzene, Chloroform, 1,2-Dichloroethane, Dichloromethane, 1,1,1-Trichloroethane, 1,1,2-Trichloroethane, Dichlorobromomethane, Tetrachloroethylene, Trichloroethene, 1,1-Dichloroethene, 2-Chlorophenol, 2,4-Dichlorophenol, 4-Nitrophenol, Pentacholorophenol, 2-Nitrophenol, Phenols, 2,4,6-Trichlorophenol, Di(2-ethylhexyl) phthalate (DEHP), Dibutyl phthalate (DBP), Benzyl butyl phthalate (BBP), Anthracene, 1,2-Diphenylhydrazine, Isophorone, and Carbon Tetrachloride.

These Standards are applicable to wafer and semiconductor manufacturing enterprises announced as regulated in the enterprise classification and definitions of the Water Pollution Control Act.

1See the attached table 1 for the water quality items and limits prescribed in these Standards.

2For the enterprises discharging wastewater to the special receiving water body in the water pollution total quantity control zone (“total quantity control zones” in brief) that has been announced by the special municipality, county or city competent authority for protecting the farmland water body, the regulations in Table 2 shall be applicable to the limits of copper, zinc, total chromium, nickel, cadmium and hexavalent chromium in the effluent. The regulations in table 2 shall not be applicable for the enterprises in the total quality control zones if the wastewater is discharged at a discharging point outside the total quality control zone through the attached pipelines along irrigation canals and all classes of water drainage channels, or jointly discharged through the pipelines, or if the wastewater is discharged at a discharging point in the total quality control zone but not to the special receiving water body

The industries, their associations, or relevant environmental groups may submit detailed, scientific data or information at any time for review and revision reference.

The COD limits determined in these Standards shall be tested using the potassium dichromate oxidation method.

1Concerning the limits in the foregoing paragraph, apart from the pH, which is defined as a range and not in units, the rest are defined as the maximum allowed value using the following units of measure:

2I. Water temperature: Celsius (℃)

3II. Other items: milligrams per liter (mg/L)

With regard to the limits for the items in these Standards, apart from water temperature and pH, these standards shall not apply when an enterprise obtains water from a water body for non-contact cooling or circulating cooling and such water is discharged to the surface water body from which it was originally obtained.

1When an enterprise belongs to two or more industry types or belongs to one industry type but operates different production processes, the mixing, treatment and discharge of wastewater shall comply with the effluent standards for each industry type.When identical control items have different control limits, effluent shall comply with the stricter of the two limits.When the quantity of wastewater from one industry type is 75% or more of the total wastewater quantity from all industry types and independent cumulative measuring equipment has been installed, the enterprise may apply with the competent authority to make the effluent standards of the said industry type the basis for all control items.

2The percentage of wastewater as stated in the foregoing paragraph shall be calculated according to records starting from six months prior to the date of application.

Unless an enforcement date is separately designated, these standards shall take effect on the date of promulgation.